Electrical insulation characteristics of metal-insulator-metal structures using boron nitride dielectric films deposited with low-energy ion impact

Yuma Kamimura, Masataka Torigoe, Kungen Teii, Seiichiro Matsumoto

研究成果: Contribution to journalArticle査読

抄録

Sp2-bonded boron nitride (BN) films are deposited on Ni and Si substrates with mean ion impact energies between a few eV and around 100 eV by surface-wave plasma enhanced chemical vapor deposition and their electrical insulation characteristics are examined for temperatures up to 300 °C. The overall crystallinity and order of sp2 structure in the films increase with decreasing ion energy, while the mass density becomes as high as sintered hexagonal BN only when the ion energy is above ∼50 eV. For a given temperature, the electrical resistivity of the films measured for metal-BN-metal structures increases with decreasing ion energy, and hence increasing crystallinity and order of sp2 structure, almost independent of mass density. A decrease in resistivity with temperature is small below 150 °C, then becomes large above 150 °C with a drastic increase in apparent activation energy for carriers, which is attributed to generation and transport of the carriers that get over higher barrier heights associated with stronger ion impact.

本文言語英語
論文番号105353
ジャーナルMaterials Science in Semiconductor Processing
121
DOI
出版ステータス出版済み - 1 2021

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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