Electrical properties of boron-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films

Yūki Katamune, Satoshi Takeichi, Ryota Ohtani, Satoshi Koizumi, Eiji Ikenaga, Kazutaka Kamitani, Takeharu Sugiyama, Tsuyoshi Yoshitake

研究成果: ジャーナルへの寄稿記事

抄録

Boron-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films were deposited by coaxial arc plasma deposition with boron-blended graphite targets. The effects of boron incorporation on the electrical properties of the films were investigated by hard X-ray photoelectron spectroscopy. Their electrical conductivity increased from 10−7 to 10−1 Ω−1 cm−1 with increasing boron content up to 5 at.%. From the temperature dependence of electrical conductivity, hopping conduction due to localized states produced by boron atoms is predominant in carrier transport. X-ray photoelectron spectra showed the shifts of Fermi levels toward the top of the valence band with increasing boron content. It implies that boron atoms in the films lead to form localized states, which results in enhanced electrical conductivity.

元の言語英語
記事番号295
ジャーナルApplied Physics A: Materials Science and Processing
125
発行部数5
DOI
出版物ステータス出版済み - 5 1 2019

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Diamond
Boron
Carbon films
Amorphous carbon
Composite films
Diamonds
boron
Electric properties
diamonds
electrical properties
composite materials
carbon
electrical resistivity
Plasma deposition
Atoms
Graphite
Carrier transport
Photoelectrons
Valence bands
Fermi level

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

これを引用

Electrical properties of boron-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films. / Katamune, Yūki; Takeichi, Satoshi; Ohtani, Ryota; Koizumi, Satoshi; Ikenaga, Eiji; Kamitani, Kazutaka; Sugiyama, Takeharu; Yoshitake, Tsuyoshi.

:: Applied Physics A: Materials Science and Processing, 巻 125, 番号 5, 295, 01.05.2019.

研究成果: ジャーナルへの寄稿記事

Katamune, Yūki ; Takeichi, Satoshi ; Ohtani, Ryota ; Koizumi, Satoshi ; Ikenaga, Eiji ; Kamitani, Kazutaka ; Sugiyama, Takeharu ; Yoshitake, Tsuyoshi. / Electrical properties of boron-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films. :: Applied Physics A: Materials Science and Processing. 2019 ; 巻 125, 番号 5.
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AU - Ikenaga, Eiji

AU - Kamitani, Kazutaka

AU - Sugiyama, Takeharu

AU - Yoshitake, Tsuyoshi

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