Electrical properties of homoepitaxial boron-doped diamond thin films grown by chemical vapor deposition using trimethylboron as dopant

Shigeharu Morooka, Terumi Fukui, Kiyohiko Semoto, Toshiki Tsubota, Takeyasu Saito, Katsuki Kusakabe, Hideaki Maeda, Yasunori Hayashi, Tanemasa Asano

研究成果: Contribution to journalArticle査読

7 被引用数 (Scopus)

抄録

Boron-doped diamond was synthesized homoepitaxially on (100) diamond by microwave plasma-assisted chemical vapor deposition (MPCVD), using methane as the carbon source and trimethylboron as the boron source. The Hall mobility of the boron-doped films increased with increasing total reaction pressure under the conditions employed. The highest mobility at room temperature was achieved at a total pressure of 10.6 kPa and was 750 cm2 V-1 s-1 at a hole concentration of 4.5 x 1014 cm-3. The values for Hall mobility were comparable to those reported for homoepitaxial (100) diamond films doped with diborane, as well as natural IIb diamond. This suggests that the chemical form of the dopant is not critical in terms of the Hall mobility of diamond films formed by MPCVD.

本文言語英語
ページ(範囲)42-47
ページ数6
ジャーナルDiamond and Related Materials
8
1
DOI
出版ステータス出版済み - 1 1 1999
外部発表はい

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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