@inproceedings{c3b8a7a4e3754dfc84a8ab7f9a66fbf8,
title = "Electrochemical deposition of metallic nanowires as a scanning probe tip",
abstract = "This paper describes Ni electrodeposition for producing metallic nanowires as a nanoprobe tip. A polycarbonate porous membrane was used as a template for the growth of nanowires on a Si AFM probe tip. A focused ion beam (FIB) was used to deposit a thin Pt layer as the cathode with a controlled small area on the tip apex and the underlying membrane surface. The produced nanowire-AFM probe showed compatibility with a conventional AFM system. We also demonstrated deposition of Al2O3 by atomic layer deposition (ALD) into the template with the aim of decreasing the nanowire diameters.",
author = "M. Motoyama and Dasgupta, {N. P.} and Prinz, {F. B.}",
year = "2009",
doi = "10.1149/1.3169314",
language = "English",
isbn = "9781615676408",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "46",
pages = "3--12",
booktitle = "ECS Transactions - Molecular Structure of the Solid-Liquid Interface and its Relationship to Electrodeposition 6 - 214th ECS Meeting",
edition = "46",
note = "Molecular Structure of the Solid-Liquid Interface and its Relationship to Electrodeposition 6 - 214th ECS Meeting ; Conference date: 12-10-2008 Through 17-10-2008",
}