Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C

Toshiyuki Nohira, Hironori Nakajima, Kan Kitagawa, Rika Hagiwara, Kouji Nitta, Shinji Inazawa, Kazunori Okada

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

2 被引用数 (Scopus)

抄録

The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.

本文言語英語
ホスト出版物のタイトルECS Transactions - 15th International Symposium on Molten Salts
出版社Electrochemical Society Inc.
ページ333-340
ページ数8
35
ISBN(印刷版)9781566775922
DOI
出版ステータス出版済み - 2006
外部発表はい
イベント15th International Symposium on Molten Salts - 210th ECS Meeting - Cancun, メキシコ
継続期間: 10 29 200611 3 2006

出版物シリーズ

名前ECS Transactions
番号35
3
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

その他

その他15th International Symposium on Molten Salts - 210th ECS Meeting
国/地域メキシコ
CityCancun
Period10/29/0611/3/06

All Science Journal Classification (ASJC) codes

  • 工学(全般)

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