Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C

Toshiyuki Nohira, Hironori Nakajima, Kan Kitagawa, Rika Hagiwara, Kouji Nitta, Shinji Inazawa, Kazunori Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

2 引用 (Scopus)

抄録

The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.

元の言語英語
ホスト出版物のタイトルECS Transactions - 15th International Symposium on Molten Salts
ページ333-340
ページ数8
エディション35
DOI
出版物ステータス出版済み - 12 1 2007
外部発表Yes
イベント15th International Symposium on Molten Salts - 210th ECS Meeting - Cancun, メキシコ
継続期間: 10 29 200611 3 2006

出版物シリーズ

名前ECS Transactions
番号35
3
ISSN(印刷物)1938-5862
ISSN(電子版)1938-6737

その他

その他15th International Symposium on Molten Salts - 210th ECS Meeting
メキシコ
Cancun
期間10/29/0611/3/06

Fingerprint

Refractory metals
Electrodeposition
Tungsten
Molten materials
Nickel
Salts
Substrates
Electrolysis
Eutectics
Molybdenum
Solubility
Semiconductor materials
Liquids
Testing
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

これを引用

Nohira, T., Nakajima, H., Kitagawa, K., Hagiwara, R., Nitta, K., Inazawa, S., & Okada, K. (2007). Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. : ECS Transactions - 15th International Symposium on Molten Salts (35 版, pp. 333-340). (ECS Transactions; 巻数 3, 番号 35). https://doi.org/10.1149/1.2798676

Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. / Nohira, Toshiyuki; Nakajima, Hironori; Kitagawa, Kan; Hagiwara, Rika; Nitta, Kouji; Inazawa, Shinji; Okada, Kazunori.

ECS Transactions - 15th International Symposium on Molten Salts. 35. 編 2007. p. 333-340 (ECS Transactions; 巻 3, 番号 35).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nohira, T, Nakajima, H, Kitagawa, K, Hagiwara, R, Nitta, K, Inazawa, S & Okada, K 2007, Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. : ECS Transactions - 15th International Symposium on Molten Salts. 35 Edn, ECS Transactions, 番号 35, 巻. 3, pp. 333-340, 15th International Symposium on Molten Salts - 210th ECS Meeting, Cancun, メキシコ, 10/29/06. https://doi.org/10.1149/1.2798676
Nohira T, Nakajima H, Kitagawa K, Hagiwara R, Nitta K, Inazawa S その他. Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. : ECS Transactions - 15th International Symposium on Molten Salts. 35 版 2007. p. 333-340. (ECS Transactions; 35). https://doi.org/10.1149/1.2798676
Nohira, Toshiyuki ; Nakajima, Hironori ; Kitagawa, Kan ; Hagiwara, Rika ; Nitta, Kouji ; Inazawa, Shinji ; Okada, Kazunori. / Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. ECS Transactions - 15th International Symposium on Molten Salts. 35. 版 2007. pp. 333-340 (ECS Transactions; 35).
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abstract = "The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol{\%}) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol{\%} added)-WO3(0.54 mol{\%} added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.",
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