TY - JOUR
T1 - Electron tomography imaging methods with diffraction contrast for materials research
AU - Hata, Satoshi
AU - Furukawa, Hiromitsu
AU - Gondo, Takashi
AU - Hirakami, Daisuke
AU - Horii, Noritaka
AU - Ikeda, Ken Ichi
AU - Kawamoto, Katsumi
AU - Kimura, Kosuke
AU - Matsumura, Syo
AU - Mitsuhara, Masatoshi
AU - Miyazaki, Hiroya
AU - Miyazaki, Shinsuke
AU - Murayama, Mitsu Mitsuhiro
AU - Nakashima, Hideharu
AU - Saito, Hikaru
AU - Sakamoto, Masashi
AU - Yamasaki, Shigeto
N1 - Funding Information:
The Japan Society for the Promotion of Science (JSPS)/Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan KAKENHI (JP15360336, JP18681019, JP22102002, JP22310068, JP22360267, JP25286027, JP18K18954, JP18H05479); Japan Science and Technology Agency (JST) CREST (#JPMJCR18J4); the JST ‘Development of systems and technology for advanced measurement and analysis’ program; the MEXT ‘Advanced Research Network for Ultra-Microscopic Science’ program; Iketani Science and Technology Foundation; JFE 21st Century Foundation; and Research and Education Center for Advanced Energy Materials, Devices, and Systems, Kyushu University.
Publisher Copyright:
© 2020 The Author(s). Published by Oxford University Press on behalf of The Japanese Society of Microscopy. All rights reserved.
PY - 2020/3/25
Y1 - 2020/3/25
N2 - Transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) enable the visualization of three-dimensional (3D) microstructures ranging from atomic to micrometer scales using 3D reconstruction techniques based on computed tomography algorithms. This 3D microscopy method is called electron tomography (ET) and has been utilized in the fields of materials science and engineering for more than two decades. Although atomic resolution is one of the current topics in ET research, the development and deployment of intermediate-resolution (non-atomic-resolution) ET imaging methods have garnered considerable attention from researchers. This research trend is probably not irrelevant due to the fact that the spatial resolution and functionality of 3D imaging methods of scanning electron microscopy (SEM) and X-ray microscopy have come to overlap with those of ET. In other words, there may be multiple ways to carry out 3D visualization using different microscopy methods for nanometer-scale objects in materials. From the above standpoint, this review paper aims to (i) describe the current status and issues of intermediate-resolution ET with regard to enhancing the effectiveness of TEM/STEM imaging and (ii) discuss promising applications of state-of-the-art intermediate-resolution ET for materials research with a particular focus on diffraction contrast ET for crystalline microstructures (superlattice domains and dislocations) including a demonstration of in situ dislocation tomography.
AB - Transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) enable the visualization of three-dimensional (3D) microstructures ranging from atomic to micrometer scales using 3D reconstruction techniques based on computed tomography algorithms. This 3D microscopy method is called electron tomography (ET) and has been utilized in the fields of materials science and engineering for more than two decades. Although atomic resolution is one of the current topics in ET research, the development and deployment of intermediate-resolution (non-atomic-resolution) ET imaging methods have garnered considerable attention from researchers. This research trend is probably not irrelevant due to the fact that the spatial resolution and functionality of 3D imaging methods of scanning electron microscopy (SEM) and X-ray microscopy have come to overlap with those of ET. In other words, there may be multiple ways to carry out 3D visualization using different microscopy methods for nanometer-scale objects in materials. From the above standpoint, this review paper aims to (i) describe the current status and issues of intermediate-resolution ET with regard to enhancing the effectiveness of TEM/STEM imaging and (ii) discuss promising applications of state-of-the-art intermediate-resolution ET for materials research with a particular focus on diffraction contrast ET for crystalline microstructures (superlattice domains and dislocations) including a demonstration of in situ dislocation tomography.
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U2 - 10.1093/jmicro/dfaa002
DO - 10.1093/jmicro/dfaa002
M3 - Review article
C2 - 32115659
AN - SCOPUS:85085265572
VL - 69
SP - 141
EP - 155
JO - Microscopy (Oxford, England)
JF - Microscopy (Oxford, England)
SN - 2050-5698
IS - 3
ER -