Electron transport of glow-discharged C2H2- and CH4-based SiCx:H films has been studied by time-of-flight method. The electron mobility at room temperature decreases nearly exponentially with increasing carbon content in both C2H2- and CH4-based films. This decrease is mainly due to a broadening of the tail states width in SiCx:H films, as implied from the carbon content dependence of the activation energy of the electron mobility in CH4-based films.
|ジャーナル||Solar Energy Materials|
|出版ステータス||出版済み - 12月 1 1991|
!!!All Science Journal Classification (ASJC) codes