Electrostatic inkjet patterning using Si needle prepared by anodization

Yuji Ishida, Kazunori Hakiai, Kazunari Matsuzaki, Akiyoshi Baba, Tanemasa Asano

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Electrostatic inkjet pattern formation was carried out using Si-needle inkjet head. The head was fabricated by preparing the Si needle using anodization of Si(100) with pn-junction at the surface and transferring the needle to another Si substrate using direct bonding technique. The printed pattern was observed with an optical microscope. The line width decreased with increasing the scanning velocity. The fine patterning technology was expected to facilitate the application of the liquid ejection technology to various electronic devices.

本文言語英語
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2004
ページ28-29
ページ数2
出版ステータス出版済み - 2004
外部発表はい
イベント2004 International Microprocesses and Nanotechnology Conference - Osaka, 日本
継続期間: 10 26 200410 29 2004

その他

その他2004 International Microprocesses and Nanotechnology Conference
Country日本
CityOsaka
Period10/26/0410/29/04

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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