Electrostatic inkjet patterning using Si needle prepared by anodization

Yuji Ishlda, Kazunori Hakiai, Akiyoshi Baba, Tanemasa Asano

研究成果: ジャーナルへの寄稿学術誌査読

17 被引用数 (Scopus)


A new electrostatic Inkjet head composed of a Si needle having a very high aspect ratio was fabricated using a Si process combined with anodization, and fine droplets could be ejected with this head. An observation of droplet ejection with a high-speed optical camera revealed that ejection behavior can be categorized into two modes: a needle-mode ejection and an orifice-mode ejection. It was found that the mode of ejection could be determined by negative pressure applied to an ink reservoir. The mechanism of the occurrence of these two modes is discussed. The needle-mode ejection generated very fine droplets and a line of submicron width was drawn. These experimental results suggest that droplets whose size was less than a few hundreds nm were generated by the needle-mode ejection. The ejection of a photoresist material is also investigated.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
7 B
出版ステータス出版済み - 7月 26 2005

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)


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