Electrostatic measurement of plasma plume characteristics in pulsed laser evaporated carbon

R. M. Mayo, J. W. Newman, A. Sharma, Yukihiko Yamagata, J. Narayan

研究成果: Contribution to journalArticle査読

31 被引用数 (Scopus)

抄録

A triple Langmuir probe measurement was used to investigate plasma plume character in low fluence pulsed laser evaporation (PLE) discharges in diamond-like carbon film deposition. Initial findings from combined ion probe, visible spectroscopy, and film analysis is presented to provide a more detailed description of plasma plume characteristics and the relationship to film properties. Analytic modeling of the ion current in the supersonic plume allows an estimate of the ion number density throughout the plume.

本文言語英語
ページ(範囲)2865-2871
ページ数7
ジャーナルJournal of Applied Physics
86
5
DOI
出版ステータス出版済み - 1 1 1999
外部発表はい

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

フィンガープリント

「Electrostatic measurement of plasma plume characteristics in pulsed laser evaporated carbon」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル