抄録
Electrostatic (Langmuir) probe measurements were conducted in the carbon pulsed laser evaporation (PLE) plume to investigate plume dynamics and correlate against film properties. Preliminary results indicate electron densities on the order of 1012-1015 cm-3 and electron temperatures approximately 0.25-0.5 eV at 1 cm from the target surface. Plasma density is often observed to increase initially with probe-target separation distance before decreasing.
本文言語 | 英語 |
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ページ数 | 1 |
ジャーナル | IEEE International Conference on Plasma Science |
出版ステータス | 出版済み - 12月 1 1999 |
外部発表 | はい |
イベント | The 26th IEEE International Conference on Plasma Science (ICOPS99) - Monterey, CA, USA 継続期間: 6月 20 1999 → 6月 24 1999 |
!!!All Science Journal Classification (ASJC) codes
- 原子分子物理学および光学
- 凝縮系物理学
- 電子工学および電気工学