Elimination of droplets using a vane velocity filter for pulsed laser ablation of FeSi 2

Tsuyoshi Yoshitake, Gousuke Shiraishi, Kunihito Nagayama

    研究成果: Contribution to journalConference article

    40 引用 (Scopus)

    抜粋

    Semiconducting β-FeSi 2 is a future promising material for Si-ULSI compatible optoelectronics devices, solar cells and IR photo-sensors. Pulsed laser deposition (PLD) make possible low temperature growth of β-FeSi 2 . However many droplets are co-deposited with the ablation species, and thus the films obtained by PLD are difficult to be applied for electronic devices. In order to eliminate droplets, a vane velocity filter was adapted. The droplets decreased drastically. The velocity distribution was obtained for various droplet sizes. The maximum velocity of droplets is at most 65 m/s. It is possible to eliminate the droplets completely at the suitable cutoff velocity of the filter.

    元の言語英語
    ページ(範囲)379-383
    ページ数5
    ジャーナルApplied Surface Science
    197-198
    DOI
    出版物ステータス出版済み - 1 1 2002
    イベントCola 2001 - Tsukuba, 日本
    継続期間: 10 1 200110 1 2001

    All Science Journal Classification (ASJC) codes

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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