Emission characteristics of debris from CO2 and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source

A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, T. Okada

研究成果: Contribution to journalArticle査読

19 被引用数 (Scopus)

抄録

We describe a comparative study of the emission characteristics of debris from CO2 and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a CO2 laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the CO2 laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the CO2 laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the CO2 LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the CO 2 and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of 106.

本文言語英語
ページ(範囲)73-77
ページ数5
ジャーナルApplied Physics B: Lasers and Optics
92
1
DOI
出版ステータス出版済み - 7 2008

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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