Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

研究成果: Contribution to journalConference article

1 引用 (Scopus)


We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.

ジャーナルJournal of Physics: Conference Series
出版物ステータス出版済み - 1 1 2014
イベント26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本
継続期間: 9 23 20139 24 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

フィンガープリント Emission spectroscopy of Ar + H<sub>2</sub> + C<sub>7</sub>H<sub>8</sub> plasmas: C<sub>7</sub>H<sub>8</sub> flow rate dependence and pressure dependence' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

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