Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

研究成果: ジャーナルへの寄稿Conference article

1 引用 (Scopus)

抄録

We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.

元の言語英語
記事番号012010
ジャーナルJournal of Physics: Conference Series
518
発行部数1
DOI
出版物ステータス出版済み - 1 1 2014
イベント26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本
継続期間: 9 23 20139 24 2013

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magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
electron energy
high energy electrons
electron impact
energy
coefficients
excitation

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Emission spectroscopy of Ar + H2 + C7H8 plasmas : C7H8 flow rate dependence and pressure dependence. / Dong, X.; Koga, K.; Yamashita, D.; Seo, H.; Itagaki, N.; Shiratani, M.; Setsuhara, Y.; Sekine, M.; Hori, M.

:: Journal of Physics: Conference Series, 巻 518, 番号 1, 012010, 01.01.2014.

研究成果: ジャーナルへの寄稿Conference article

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abstract = "We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100{\%}) and Ar+H2(33{\%}) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.",
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AU - Dong, X.

AU - Koga, K.

AU - Yamashita, D.

AU - Seo, H.

AU - Itagaki, N.

AU - Shiratani, M.

AU - Setsuhara, Y.

AU - Sekine, M.

AU - Hori, M.

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AB - We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.

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