Energy dependence of angular distributions of sputtered particles by ion-beam bombardment at normal incidence

Yoshinobu Matsuda, Yasutoshi Ueda, Kiichiro Uchino, Katsunori Muraoka, Masanori Akazaki, Yasunori Yamamura, Mitsuo Maeda

研究成果: Contribution to journalArticle査読

28 被引用数 (Scopus)

抄録

The angular distributions of sputtered Fe-atoms were measured using the laser fluorescence technique during Ar-ion bombardment for energies of 0.6, 1, 2 and 3 keV at normal incidence. The measured cosine distribution at 0.6 keV progressively deviated to an over-cosine distribution at higher energies, and at 3 keV the angular distribution was an overcosine distribution of about 20%. The experimental results agree qualitatively with calculations by a recent computer simulation code, ACAT. The results are explained by the competition between surface scattering and the effects of primary knock-on atoms, which tend to make the angular distributions over-cosine and under-cosine, respectively.

本文言語英語
ページ(範囲)8-11
ページ数4
ジャーナルJapanese journal of applied physics
25
1
DOI
出版ステータス出版済み - 1 1986

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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