Enhanced hardness of nanocarbon films deposited on cemented tungsten carbide substrates by coaxial arc plasma deposition owing to employing silicon-doped graphite targets

Mohamed Egiza, Kouki Murasawa, Ali M. Ali, Yasuo Fukui, Hidenobu Gonda, Masatoshi Sakurai, Tsuyoshi Yoshitake

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

1 at% Si-doped nanocrystalline diamond/amorphous carbon (NCD/a-C) composite films were deposited on cemented carbide (WC-Co) substrates by coaxial arc plasma deposition. The doping of Si evidently degraded the hardness of films directly deposited on the substrates due to catalytic effects of diffused Co atoms into the films. On the other hand, by employing undoped NCD/a-C buffer layers, the Co diffusion was suppressed and the hardness was enhanced from 42 to 60 GPa. It was found that the Si doping enhances the formation of C-C sp3 bonds, which resulted in the hardness enhancement in the case of suppressing the Co diffusion by insertion of undoped NCD/a-C buffer layers.

本文言語英語
論文番号075507
ジャーナルJapanese journal of applied physics
58
7
DOI
出版ステータス出版済み - 2019

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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