Although it is well known that LaBa2Cu3Oy (La123) superconductor has a possibility for the highest Tc among REBa2Cu3Oy (RE123) materials, it is hard to obtain a high Tc since solid solutions with low-Tc are easily formed. In this work, we prepared La123 thin films by conventional pulsed laser deposition (PLD) method and novel low temperature growth (LTG) technique and we compared Tc of the La123 thin films. As a result, La123 thin films grown at a relative low temperature by using LTG technique showed higher Tc than those of films grown by PLD method. From an evaluation of orthorhombicity by using in-plane X-ray diffraction system, the orthorhombicity became larger with decreasing the substrate temperature and Tc of LTG-La123 thin films also increased up to 83 K. Those facts indicate that the formation of low-Tc solid solutions is suppressed by low temperature growth.
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