Epitaxial CVD growth of graphene: Growth mechanism, nanofabrication, and properties

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    1 引用 (Scopus)

    抜粋

    Graphene is emerging as a new material for future applications in electronics, mechanics, optics, and energy. Recently, catalytic chemical vapor deposition (CVD) growth has attracted considerable interest as an effective means of producing large-area graphene films with relatively low cost. However, because most of the CVD growth has been done over polycrystalline metal films or foils, as-grown graphene has relatively small grain size and its orientation is not controlled. Here, I present our recent studies on our epitaxial CVD growth of graphene using the crystalline metal films deposited on sapphire c-plane and MgO substrates. The domain structure is discussed in terms of crystalline plane dependence of the catalyst Cu film. Further development of this epitaxial graphene film to fabricate nanoribbon structures as well as the catalytic growth of graphene nanoribbons is also demonstrated.

    元の言語英語
    ホスト出版物のタイトルProceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices
    ホスト出版物のサブタイトルTFT Technologies and FPD Materials, AM-FPD 2013
    ページ55-58
    ページ数4
    出版物ステータス出版済み - 2013
    イベント20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 - Kyoto, 日本
    継続期間: 7 2 20137 5 2013

    出版物シリーズ

    名前Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013

    その他

    その他20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013
    日本
    Kyoto
    期間7/2/137/5/13

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering

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  • これを引用

    Ago, H. (2013). Epitaxial CVD growth of graphene: Growth mechanism, nanofabrication, and properties. : Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 (pp. 55-58). [6617776] (Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013).