Epitaxial CVD growth of high-quality graphene and recent development of 2D heterostructures

Hiroki Ago, Yui Ogawa, Kenji Kawahara, Yoshito Ito, Baoshan Hu, Carlo M. Orofeo, Pablo Soils Fernandez, Hiroko Endo, Hiroki Hibino, Seigi Mizuno, Kazuhito Tsukagoshi, Masaharu Tsuji

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    抜粋

    We demonstrate a novel epitaxial CVD method to grow high quality single-layer graphene using a thin Cu(111) film instead of conventional Cu foil. The atomically smooth Cu(111) catalyst produced the graphene with less defects and controlled orientation of the hexagonal lattice. The CVD graphene showed the carrier mobility as high as 20,000 cm2/Vs at room temperature. Using the uniform graphene sheet, densely aligned graphene nanoribbons were produced by a metal-assisted etching technique, resulting a high on/off ratio of 5,000. In addition, the epitaxial CVD method was applied to grow uniform double-layer graphene with more than 90% coverage. These GNRs and double-layer graphene are expected as promising candidates for semiconductor devices. Furthermore, heterostructures of MoS2 and graphene were developed, and unique photo-responsive devices were observed.

    元の言語英語
    ホスト出版物のタイトル2015 IEEE International Electron Devices Meeting, IEDM 2015
    出版者Institute of Electrical and Electronics Engineers Inc.
    ページ27.2.1-27.2.4
    2016-February
    ISBN(電子版)9781467398930
    DOI
    出版物ステータス出版済み - 2 16 2015
    イベント61st IEEE International Electron Devices Meeting, IEDM 2015 - Washington, 米国
    継続期間: 12 7 201512 9 2015

    その他

    その他61st IEEE International Electron Devices Meeting, IEDM 2015
    米国
    Washington
    期間12/7/1512/9/15

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering
    • Materials Chemistry

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  • これを引用

    Ago, H., Ogawa, Y., Kawahara, K., Ito, Y., Hu, B., Orofeo, C. M., Fernandez, P. S., Endo, H., Hibino, H., Mizuno, S., Tsukagoshi, K., & Tsuji, M. (2015). Epitaxial CVD growth of high-quality graphene and recent development of 2D heterostructures. : 2015 IEEE International Electron Devices Meeting, IEDM 2015 (巻 2016-February, pp. 27.2.1-27.2.4). [7409779] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.2015.7409779