Fe(Te,S) has a tetragonal PbO type structure with Tconset of around 10 K, which is the simplest structure among iron-based superconductors. We deposited Fe(Te,S) thin films by PLD method using the second harmonic light of Nd:YAG pulsed laser (wavelength = 532 nm) in the range of a deposition rate from 14 pm/s to 56 pm/s on MgO, SrTiO3 and LaAlO3 substrates. We obtained the thin films showed the c-axis orientation normal to the film surface and in-plane alignment. The film deposited on LaAlO3 showed Tconset of 9.3 K. Tconset and Tczero increased to 11 K and 6.6 K respectively by the excess adding Te to the stoichiometric target. Tconset was higher than that of a Fe(Te,S) bulk. The lattice constant of the films was strongly related to Tconset. Tconset has local maximum value at 6.195 of c-axis length.
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