Epitaxial growth of 3C–SiC on Si(111) and (001) by laser CVD

Peipei Zhu, Meijun Yang, Qingfang Xu, Qingyun Sun, Rong Tu, Jun Li, Song Zhang, Qizhong Li, Lianmeng Zhang, Takashi Goto, Ji Shi, Haiwen Li, Hitoshi Ohmori, Marina Kosinova, Bikramjit Basu

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

Epitaxial 3C–SiC films have been deposited on Si(111) and Si(001) substrates via laser CVD with deposition rate of 12.32 and 15.56 μm/h, respectively. The activation energy of 3C–SiC on Si(111) and Si(001) was 80 and 160 kJ/mol, and the root mean square (RMS) roughness (w) as a function of the film thickness (h) follows power laws of w~h0.31 and w~h0.06, respectively. The growth mechanisms of epitaxial 3C–SiC films on Si(111) and Si(001) was investigated based on the structural analysis and roughness evolution.

本文言語英語
ページ(範囲)3850-3856
ページ数7
ジャーナルJournal of the American Ceramic Society
101
9
DOI
出版ステータス出版済み - 9 2018

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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