Erosion of carbon deposition layer by hydrogen RF plasma

Kazunari Katayama, H. Nagase, C. Nishinakamura, T. Takeishi, M. Nishikawa

研究成果: ジャーナルへの寄稿Conference article

4 引用 (Scopus)

抄録

A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.

元の言語英語
ページ(範囲)247-252
ページ数6
ジャーナルFusion Engineering and Design
81 A
発行部数1-4
DOI
出版物ステータス出版済み - 2 1 2006
イベントProceedings of the Seventh International Symposium on Fusion Nuclear Technology ISFNT-7 Part A -
継続期間: 5 22 20055 27 2005

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Hydrogen
Erosion
Carbon
Plasmas
Plasma sheaths
Langmuir probes
Graphite
Sputtering
Ions

All Science Journal Classification (ASJC) codes

  • Civil and Structural Engineering
  • Materials Science(all)
  • Nuclear Energy and Engineering
  • Mechanical Engineering

これを引用

Erosion of carbon deposition layer by hydrogen RF plasma. / Katayama, Kazunari; Nagase, H.; Nishinakamura, C.; Takeishi, T.; Nishikawa, M.

:: Fusion Engineering and Design, 巻 81 A, 番号 1-4, 01.02.2006, p. 247-252.

研究成果: ジャーナルへの寄稿Conference article

Katayama, K, Nagase, H, Nishinakamura, C, Takeishi, T & Nishikawa, M 2006, 'Erosion of carbon deposition layer by hydrogen RF plasma' Fusion Engineering and Design, 巻. 81 A, 番号 1-4, pp. 247-252. https://doi.org/10.1016/j.fusengdes.2005.09.030
Katayama, Kazunari ; Nagase, H. ; Nishinakamura, C. ; Takeishi, T. ; Nishikawa, M. / Erosion of carbon deposition layer by hydrogen RF plasma. :: Fusion Engineering and Design. 2006 ; 巻 81 A, 番号 1-4. pp. 247-252.
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