Evaluation of effective length of the enhanced oxidation of active oxygen produced using SrTixMg1-xO3-δ catalyst for low-temperature oxidation

Hsiang Fang Sun, Akihiro Ikeda, Tanemasa Asano

研究成果: Contribution to journalArticle査読

抄録

Thermal oxidation using the SrTixMg1-xO3-δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal-Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24mm.

本文言語英語
論文番号04FB09
ジャーナルJapanese journal of applied physics
57
4
DOI
出版ステータス出版済み - 4 2018

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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