Evaluation of laser trapping probe properties for coordinate measurement

Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

4 被引用数 (Scopus)

抄録

For past decades Micro-System Technology (MST) has been developed and it has enabled fabricating the microcomponents on the micro-systems. In order to measure such microcomponents having micrometer-size shapes, a concept of nano-CMM was proposed. According to the concept, nano-CMM specifications are, for example, a measuring range is (10 mm)3 and accuracy is 50 nm. Then, we have proposed a laser trapping probe as a position detecting probe for nano-CMM. The laser trapping probe can be suitable to nano-CMM because of high sensitivity, an availability of a high spherical probe stylus and changeable properties. On the other hands, there are sources of uncertainties, one of them is the standing wave, and the influence is experimentally investigated. The results reveal the facts such as following. The standing wave obviously influences the behavior of the laser trapping probe sphere. The positional fluctuations by the standing wave proceed several hundreds nm, and the phenomenon appears with high repeatability. A size of the probe sphere can be a crucial parameter for reducing the influence of a standing wave. As another possibility of reducing the influence, on the inclined substrate the probe tends not to be affected by the standing wave. On the other hands, the standing wave influences the probe sphere beyond 100 mm far from the flat silicon substrate.

本文言語英語
ホスト出版物のタイトルOptomechatronic Sensors, Instrumentation, and Computer-Vision Systems
DOI
出版ステータス出版済み - 12月 1 2006
外部発表はい
イベントOptomechatronic Sensors, Instrumentation, and Computer-Vision Systems - Boston, MA, 米国
継続期間: 10月 3 200610月 3 2006

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6375
ISSN(印刷版)0277-786X

その他

その他Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems
国/地域米国
CityBoston, MA
Period10/3/0610/3/06

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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