Evaluation technology of micro three-dimensional structure using phase-shifting digital holography

Yoshiaki Kiyama, Terutake Hayashi, Yasuhiro Takaya

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Recently, performances of the optical devices are improving with miniaturization their sizes such as the development of the photonic crystal. So, precise shape measurement with non-invasive evaluation technique is required to observe edge or steep surface of photonic crystal to evaluate the quality. Thus, we propose the method to obtain 3D nanostructure by using phase-shifting digital holography system. Phase-shifting digital holography is the method to obtain the complex amplitude of the sample through some phase-shifted holograms. It is considered that the holography system has the nano meter resolution in axial direction and is able to achieve the nano defect detection for the photonic crystal devices. In this paper, we suggest a novel phase-shifting digital holography method applied optical heterodyne interferometer. Optical heterodyne interferometer is the method using two different (close-by) wavelengths of light for object light and reference light, and interferential intensity distribution changes temporally with their different frequencies. We suggest a novel phase-shifting digital holography method applied optical heterodyne interferometer. Four phase-different signals can be acquired from the time-domain heterodyne signal based on cycle of beat signal.

本文言語英語
ホスト出版物のタイトル10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
ページ547-550
ページ数4
出版ステータス出版済み - 2010
外部発表はい
イベント10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, 日本
継続期間: 9 5 20109 9 2010

出版物シリーズ

名前10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

その他

その他10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
国/地域日本
CityOsaka
Period9/5/109/9/10

All Science Journal Classification (ASJC) codes

  • 安全性、リスク、信頼性、品質管理

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