In this paper, the thermal characteristics of suspended platinum (Pt) nanofilm sensors have been investigated experimentally. The Pt nanofilm sensors with the thickness of 28-40 nm, the width of 260-601 nm, and the length of 5.3-5.7 μm were fabricated by electron beam lithography, electron beam physical vapor deposition and isotropic/anisotropic etching processes. Based on the one-dimensional heat conduction model, the in-plane thermal conductivity of the nanofilm sensors was obtained from the linear relation of the volume-averaged temperature increase and the heating rate measured in vacuum. Furthermore, natural convection heat transfer coefficients of air around the suspended nanofilm sensors at the pressures ranging from 1 × 10-2 Pa to 1 atm were also investigated. The experimental results show that the in-plane thermal conductivities of the nanofilm sensors are much lower than those of the bulk values, the natural convection heat transfer coefficients are, however, very high at the atmospheric pressure.
|ジャーナル||International Journal of Heat and Mass Transfer|
|出版物ステータス||出版済み - 10 1 2006|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Mechanical Engineering
- Fluid Flow and Transfer Processes