Extension of receptor function theory to include two types of adsorbed oxygen for oxide semiconductor gas sensors

研究成果: Contribution to journalArticle査読

49 被引用数 (Scopus)

抄録

Receptor function of oxide semiconductor gas sensors to oxygen and an oxidizing or reducing gas was extended successfully to include two types of adsorbed oxygen, O - and O 2-. The receptor function relying on O 2- ions is featured by linear dependence of resistance on PO 21/4 (PO 2, partial pressure of oxygen), while that relying O - shows linear dependence on PO 21/2. As a result, the resistance can be brought to a high value at small PO 2 when O 2- ions are formed. The drastic increase of resistance in air under desiccated condition can be accounted for as a result of the formation of O 2- ions which is blocked by water vapor in humid conditions. On the response to an oxidizing gas (NO 2) in air, O 2- ions exert an adverse effect; those increase the gross resistance of the device in air, thus reducing the conventionally defined response to the gas. Those influence on the response to a reducing gas (H 2) in a particular way. Owing to a kinetic reason, O 2- ions are almost distinguished at steady state under exposure to the gas, rendering only O - ions to be responsible for the response to the gas, and thus contributing to amplify the conventionally defined response.

本文言語英語
ページ(範囲)128-135
ページ数8
ジャーナルSensors and Actuators, B: Chemical
163
1
DOI
出版ステータス出版済み - 3 1 2012

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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