Fabrication and application of 3-D magnetically driven microtools

Yoko Yamanishi, Shinya Sakuma, Yuki Kihara, Fumihito Arai

研究成果: ジャーナルへの寄稿記事

27 引用 (Scopus)

抄録

In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.

元の言語英語
記事番号5431054
ページ(範囲)350-356
ページ数7
ジャーナルJournal of Microelectromechanical Systems
19
発行部数2
DOI
出版物ステータス出版済み - 4 1 2010

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Photolithography
Fabrication
Microactuators
Axial flow
Fluidics
Photoresists
Masks
Contamination
Finite element method
Polymers
Experiments
Ultraviolet Rays

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Fabrication and application of 3-D magnetically driven microtools. / Yamanishi, Yoko; Sakuma, Shinya; Kihara, Yuki; Arai, Fumihito.

:: Journal of Microelectromechanical Systems, 巻 19, 番号 2, 5431054, 01.04.2010, p. 350-356.

研究成果: ジャーナルへの寄稿記事

Yamanishi, Yoko ; Sakuma, Shinya ; Kihara, Yuki ; Arai, Fumihito. / Fabrication and application of 3-D magnetically driven microtools. :: Journal of Microelectromechanical Systems. 2010 ; 巻 19, 番号 2. pp. 350-356.
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