Fabrication and characterization of anatase/rutile-TiO2 thin films by magnetron sputtering: A review

Sakae Tanemura, Lei Miao, Wilfried Wunderlich, Masaki Tanemura, Yukimasa Mori, Shoichi Toh, Kenji Kaneko

研究成果: Contribution to journalReview article査読

80 被引用数 (Scopus)

抄録

This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films.

本文言語英語
ページ(範囲)11-17
ページ数7
ジャーナルScience and Technology of Advanced Materials
6
1
DOI
出版ステータス出版済み - 1 2005

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

フィンガープリント 「Fabrication and characterization of anatase/rutile-TiO<sub>2</sub> thin films by magnetron sputtering: A review」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル