Fabrication of a fiber probe using a CO2 laser for microstructure measurement: High functionality and durability test

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

研究成果: Contribution to journalConference article査読

1 被引用数 (Scopus)


In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.

ジャーナルProcedia CIRP
出版ステータス出版済み - 2018
イベント8th CIRP Conference on High Performance Cutting, HPC 2018 - Budapest, ハンガリー
継続期間: 6 25 20186 27 2018

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

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