In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.
|出版ステータス||出版済み - 2018|
|イベント||8th CIRP Conference on High Performance Cutting, HPC 2018 - Budapest, ハンガリー|
継続期間: 6 25 2018 → 6 27 2018
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Industrial and Manufacturing Engineering