Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura

研究成果: Contribution to conferencePaper査読

抄録

This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

本文言語英語
出版ステータス出版済み - 2015
イベント21st IMEKO World Congress on Measurement in Research and Industry - Prague, チェコ共和国
継続期間: 8 30 20159 4 2015

その他

その他21st IMEKO World Congress on Measurement in Research and Industry
国/地域チェコ共和国
CityPrague
Period8/30/159/4/15

All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

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