Fabrication of CO2 sensor using NASICON thick film

Yuji Miyachi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe

研究成果: ジャーナルへの寄稿会議記事査読

33 被引用数 (Scopus)


The condition of screen-printing paste was explored to densify a thick film of Na+ conductor, Na3Zr2Si2PO12 (NASICON) deposited on an alumina substrate. A fair well-densified NASICON thick film was found to be obtained from a paste consisting of NASICON powder and ethylene glycol dispersant by screen-printing and calcination at 1000 °C. The resulting planar sensor showed good CO2 sensing capability even under humid conditions, although the emf tended to shift upward with increasing relative humidity. In order to reduce the disturbance by humidity, applicability of an oxide-ionic conductor of Bi2Me0.1V0.9O5.35 as a counter electrode material was examined. The oxide-incorporated devices, of both disk type and planar, exhibited stable CO2 sensing properties under dry as well as humid conditions. In addition, the dependence of emf on RH could be reduced considerably with the oxide-incorporated devices. It was found, however, that the RH dependence of emf originates from both of the sensing and counter electrodes so that the RH dependence of both electrodes should be tackled with to eliminate the RH dependence of the devices.

ジャーナルSensors and Actuators, B: Chemical
出版ステータス出版済み - 8月 1 2003
イベントProceedings of the Ninth International Meeting on Chemical Engineering - Boston, MA, 米国
継続期間: 7月 7 20037月 10 2003

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学


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