Fabrication of highly conductive 12CaO·7Al2O3 thin films encaging hydride ions by proton implantation

Masashi Miyakawa, Katsuro Hayashi, Masahiro Hirano, Yoshitake Toda, Toshio Kamiya, Hideo Hosono

研究成果: Contribution to journalReview article査読

56 被引用数 (Scopus)

抄録

A method to obtain a polycrystalline thin film, where an amorphous C12A7 film was first deposited was developed. The effects of hydrogenation using thermal treatment in H2 atmosphere or proton implantation were investigated. The results indicated that the H-loaded C12A7 films provide a unique capability to realize semi-transparent electric circuits directly patterned by UV-light irradiation.

本文言語英語
ページ(範囲)1100-1103
ページ数4
ジャーナルAdvanced Materials
15
13
DOI
出版ステータス出版済み - 7 4 2003
外部発表はい

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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