Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization

K. Higa; T. Asano

doi:10.1109/IMNC.1998.730032

Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization

日本エジプト科学技術連携センター

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

本文言語	英語
ホスト出版物のタイトル	Digest of Papers - Microprocesses and Nanotechnology 1998
ホスト出版物のサブタイトル	1998 International Microprocesses and Nanotechnology Conference
編集者	Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	178-179
ページ数	2
ISBN（電子版）	4930813832, 9784930813831
DOI	https://doi.org/10.1109/IMNC.1998.730032
出版ステータス	出版済み - 1998
イベント	1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, 韓国継続期間: 7月 13 1998 → 7月 16 1998

出版物シリーズ

名前	Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
巻	1998-July

その他

その他	1998 International Microprocesses and Nanotechnology Conference, MNC 1998
国/地域	韓国
City	Kyoungju
Period	7/13/98 → 7/16/98

!!!All Science Journal Classification (ASJC) codes

材料科学（全般）
核物理学および高エネルギー物理学
コンピュータサイエンスの応用

文献へのアクセス

10.1109/IMNC.1998.730032

他のファイルとリンク

引用スタイル

Higa, K., & Asano, T. (1998). Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization. In H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (Eds.), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 178-179). [730032] (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.730032

Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization. / Higa, K.; Asano, T.
Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. ed. / Hyung Joon Yoo; Shinji Okazaki; Jinho Ahn; Ohyun Kim; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. p. 178-179 730032 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July).

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

Higa, K & Asano, T 1998, Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization. in HJ Yoo, S Okazaki, J Ahn, O Kim & M Komuro (eds), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference., 730032, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference, vol. 1998-July, Institute of Electrical and Electronics Engineers Inc., pp. 178-179, 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, Kyoungju, 韓国, 7/13/98. https://doi.org/10.1109/IMNC.1998.730032

Higa K, Asano T. Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization. In Yoo HJ, Okazaki S, Ahn J, Kim O, Komuro M, editors, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1998. p. 178-179. 730032. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference). doi: 10.1109/IMNC.1998.730032

Higa, K. ; Asano, T. / Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization. Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. editor / Hyung Joon Yoo ; Shinji Okazaki ; Jinho Ahn ; Ohyun Kim ; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 178-179 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference).

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