Fabrication of micro patterned ceramic structure by imprinting process

Yang Xu, Fujio Tsumori, Hyung Goo Kang, Hidesh Miura

研究成果: ジャーナルへの寄稿学術誌査読

27 被引用数 (Scopus)


In this report, an improved fabrication method of micro powder imprinting (μ;PI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8μm were obtained on 300μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.

ジャーナルFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
出版ステータス出版済み - 11月 2011

!!!All Science Journal Classification (ASJC) codes

  • 機械工学
  • 産業および生産工学
  • 金属および合金
  • 材料化学


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