Fabrication of microcantilever with a silicon tip prepared by anodization

Katsuya Higa, Tanemasa Asano

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抜粋

The fabrication process of a microcantilever with a silicon tip prepared by anodization for an atomic force microscope(AFM) is demonstrated. The silicon tip having a high aspect ratio can be prepared using preferential anodization of a silicon wafer with n / p junction. The microcantilever is fabricated by patterning a silicon nitride film deposited on the anodized wafer. The silicon tip is examined by observing the surface morphology of an anisotropically etched silicon step and the grains of a vacuum evaporated Au film.

元の言語英語
ページ(範囲)7078-7080
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
37
発行部数12 B
DOI
出版物ステータス出版済み - 1 1 1998

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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