Fabrication of nanoscale metal paths in oxide thin layers by noble-gas ion beams

Hiromi Yuasa, Michiko Hara, Yoshihiko Fuji, Hideaki Fukuzawa

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

We investigated the fabrication process of a nanostructure with alumina insulator layer and nanoscale Cu paths punching through an alumina layer inserted between magnetic multilayers. Ion-beam-assisted oxidation was applied to an AlCu layer, where ion beams with three kinds of noble gases of different mass, Ne, Ar and Xe, were compared. The heavy gas overcame the trade-off between the increasing purity of nanoscale Cu paths and the decreasing oxygen defects of the alumina. It is considered that the high mobility of surface atoms in the AlCu layer brought about by the heavy-gas ion beam promotes segregation of alumina and Cu.

本文言語英語
論文番号47005
ジャーナルEurophysics Letters
101
4
DOI
出版ステータス出版済み - 2 2013
外部発表はい

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

フィンガープリント

「Fabrication of nanoscale metal paths in oxide thin layers by noble-gas ion beams」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル