Fabrication of probe tips for nanoscale 3D metrology

K. Uchiyama, H. Murakami, A. Katsuki, Takao Sajima, T. Yamamoto, R. Nagata, K. Fujiyoshi

研究成果: 著書/レポートタイプへの貢献会議での発言

元の言語英語
ホスト出版物のタイトルProceedings - 32nd ASPE Annual Meeting
出版者American Society for Precision Engineering, ASPE
ページ305-310
ページ数6
ISBN(電子版)9781887706742
出版物ステータス出版済み - 1 1 2016
イベント32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 - Chartlotte, 米国
継続期間: 10 29 201711 3 2017

出版物シリーズ

名前Proceedings - 32nd ASPE Annual Meeting

その他

その他32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017
米国
Chartlotte
期間10/29/1711/3/17

Fingerprint

probe
Fabrication
metrology

All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology
  • Mechanical Engineering

これを引用

Uchiyama, K., Murakami, H., Katsuki, A., Sajima, T., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2016). Fabrication of probe tips for nanoscale 3D metrology. : Proceedings - 32nd ASPE Annual Meeting (pp. 305-310). (Proceedings - 32nd ASPE Annual Meeting). American Society for Precision Engineering, ASPE.

Fabrication of probe tips for nanoscale 3D metrology. / Uchiyama, K.; Murakami, H.; Katsuki, A.; Sajima, Takao; Yamamoto, T.; Nagata, R.; Fujiyoshi, K.

Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. p. 305-310 (Proceedings - 32nd ASPE Annual Meeting).

研究成果: 著書/レポートタイプへの貢献会議での発言

Uchiyama, K, Murakami, H, Katsuki, A, Sajima, T, Yamamoto, T, Nagata, R & Fujiyoshi, K 2016, Fabrication of probe tips for nanoscale 3D metrology. : Proceedings - 32nd ASPE Annual Meeting. Proceedings - 32nd ASPE Annual Meeting, American Society for Precision Engineering, ASPE, pp. 305-310, 32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017, Chartlotte, 米国, 10/29/17.
Uchiyama K, Murakami H, Katsuki A, Sajima T, Yamamoto T, Nagata R その他. Fabrication of probe tips for nanoscale 3D metrology. : Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE. 2016. p. 305-310. (Proceedings - 32nd ASPE Annual Meeting).
Uchiyama, K. ; Murakami, H. ; Katsuki, A. ; Sajima, Takao ; Yamamoto, T. ; Nagata, R. ; Fujiyoshi, K. / Fabrication of probe tips for nanoscale 3D metrology. Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. pp. 305-310 (Proceedings - 32nd ASPE Annual Meeting).
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