FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

Nobumitsu Hirose, Yuichi Harada, Shigeru Yoshimori, Mitsuo Kawamura

研究成果: ジャーナルへの寄稿記事

抄録

We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.

元の言語英語
ページ(範囲)425-426
ページ数2
ジャーナルTransactions of the Institute of Electronics and Communication Engineers of Japan. Section E
E69
発行部数4
出版物ステータス出版済み - 4 1986
外部発表Yes

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Reactive ion etching
Millimeter waves
Electron beams
Radiation
Fabrication

All Science Journal Classification (ASJC) codes

  • Engineering(all)

これを引用

FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS. / Hirose, Nobumitsu; Harada, Yuichi; Yoshimori, Shigeru; Kawamura, Mitsuo.

:: Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E, 巻 E69, 番号 4, 04.1986, p. 425-426.

研究成果: ジャーナルへの寄稿記事

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AU - Kawamura, Mitsuo

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