Fabrication of single-crystal Si microstructures by anodization

Katsuya Higa; Tanemasa Asano

Fabrication of single-crystal Si microstructures by anodization

Katsuya Higa, Tanemasa Asano

研究成果: Chapter in Book/Report/Conference proceeding › Other chapter contribution

抄録

We have investigated the application of the anodization process to the fabrication of microstructures consisting of single-crystal Si. When anodization is carried out in the dark, porous Si is preferentially formed in a p-type region. The porous region can be used as a sacrificial region. The unanodized Si region forms the components of the microstructures. The shape of the porous region can be controlled by varying the profiles of the n- and p-type regions and their resistivity. It has been found that, by utilizing these characteristics, various microstructures can be formed from single-crystal Si. Fabrication of a cantilever and a piezoresistive gauge for a pressure sensor are demonstrated.

本文言語	英語
ホスト出版物のタイトル	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers
編集者	Y. Aoyagi, N. Atoda, T. Fukui, M. Komuro, M. Kotera, al et al
ページ	6347-6695
ページ数	349
巻	35
版	12 B
出版ステータス	出版済み - 12 1996
外部発表	はい
イベント	Proceedings of the 1996 9th International MicroProcess Conference, MPC'96 - Kyushu, Jpn 継続期間: 7 8 1996 → 7 11 1996

その他

その他	Proceedings of the 1996 9th International MicroProcess Conference, MPC'96
City	Kyushu, Jpn
Period	7/8/96 → 7/11/96

All Science Journal Classification (ASJC) codes

Engineering(all)

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引用スタイル

Fabrication of single-crystal Si microstructures by anodization. / Higa, Katsuya; Asano, Tanemasa.

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers. ed. / Y. Aoyagi; N. Atoda; T. Fukui; M. Komuro; M. Kotera; al et al. Vol. 35 12 B. ed. 1996. p. 6347-6695.

研究成果: Chapter in Book/Report/Conference proceeding › Other chapter contribution

Higa, K & Asano, T 1996, Fabrication of single-crystal Si microstructures by anodization. in Y Aoyagi, N Atoda, T Fukui, M Komuro, M Kotera & A et al (eds), Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers. 12 B edn, vol. 35, pp. 6347-6695, Proceedings of the 1996 9th International MicroProcess Conference, MPC'96, Kyushu, Jpn, 7/8/96.

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