Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process

Tomoyuki Koga, Hideyuki Otsuka, Atsushi Takahara

研究成果: Contribution to journalArticle査読

17 被引用数 (Scopus)

抄録

Three-component micropatterned organosilane monolayer was successfully fabricated on Si-wafer substrate by a stepwise photolithography process. Scanning force microscopic observations revealed that three kinds of organosilane monolayers with different physicochemical properties were area-selectively immobilized on a Si wafer.

本文言語英語
ページ(範囲)1196-1197
ページ数2
ジャーナルChemistry Letters
12
DOI
出版ステータス出版済み - 12 5 2002

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

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