Fabrication of ultra-small-diameter optical-fiber probe using acid-etch technique and CO2 laser for 3D-micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama

研究成果: ジャーナルへの寄稿記事

1 引用 (Scopus)

抄録

This paper presents a system for measuring a 3D microstructure using an optical-fiber probe. A stylus shaft was fabricated using an acid-etch technique.We investigated the process of fabricating a stylus tip using an adhesive method, an arc-discharge method, and a CO2-laser technique. The characteristics of the stylus shaft in the process of detecting the displacement were then described. Finally, in the case wherein the stylus tip was fabricated using an adhesive, the deformation of the stylus tip caused by the contraction of an ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed using a finite-element method. Accordingly, a stylus shaft and tip with respective diameters of 0.4 µm or greater and 1 µm or greater were manufactured using the adhesive method. Moreover, the results helped confirm that stylus tips with diameters in the ranges of 20-196 and 1.2-300 µm were fabricated using the arc-discharge method and CO2-laser technique, respectively, with high yield. In addition, the results of the finite-element method revealed that the maximum elastic-deformation volume was approximately 0.8 nm and the effect of the contraction of the ultraviolet curing resin is minimal.

元の言語英語
ページ(範囲)699-706
ページ数8
ジャーナルInternational Journal of Automation Technology
11
発行部数5
DOI
出版物ステータス出版済み - 1 1 2017

Fingerprint

Optical fibers
Adhesives
Fabrication
Curing
Acids
Lasers
Resins
Finite element method
Glues
Elastic deformation
Microstructure

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

これを引用

Fabrication of ultra-small-diameter optical-fiber probe using acid-etch technique and CO2 laser for 3D-micro metrology. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao; Uchiyama, Kosuke.

:: International Journal of Automation Technology, 巻 11, 番号 5, 01.01.2017, p. 699-706.

研究成果: ジャーナルへの寄稿記事

@article{f03d4109d9064fe28a748b9a7203590b,
title = "Fabrication of ultra-small-diameter optical-fiber probe using acid-etch technique and CO2 laser for 3D-micro metrology",
abstract = "This paper presents a system for measuring a 3D microstructure using an optical-fiber probe. A stylus shaft was fabricated using an acid-etch technique.We investigated the process of fabricating a stylus tip using an adhesive method, an arc-discharge method, and a CO2-laser technique. The characteristics of the stylus shaft in the process of detecting the displacement were then described. Finally, in the case wherein the stylus tip was fabricated using an adhesive, the deformation of the stylus tip caused by the contraction of an ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed using a finite-element method. Accordingly, a stylus shaft and tip with respective diameters of 0.4 µm or greater and 1 µm or greater were manufactured using the adhesive method. Moreover, the results helped confirm that stylus tips with diameters in the ranges of 20-196 and 1.2-300 µm were fabricated using the arc-discharge method and CO2-laser technique, respectively, with high yield. In addition, the results of the finite-element method revealed that the maximum elastic-deformation volume was approximately 0.8 nm and the effect of the contraction of the ultraviolet curing resin is minimal.",
author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima and Kosuke Uchiyama",
year = "2017",
month = "1",
day = "1",
doi = "10.20965/ijat.2017.p0699",
language = "English",
volume = "11",
pages = "699--706",
journal = "International Journal of Automation Technology",
issn = "1881-7629",
publisher = "Fuji Technology Press",
number = "5",

}

TY - JOUR

T1 - Fabrication of ultra-small-diameter optical-fiber probe using acid-etch technique and CO2 laser for 3D-micro metrology

AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Sajima, Takao

AU - Uchiyama, Kosuke

PY - 2017/1/1

Y1 - 2017/1/1

N2 - This paper presents a system for measuring a 3D microstructure using an optical-fiber probe. A stylus shaft was fabricated using an acid-etch technique.We investigated the process of fabricating a stylus tip using an adhesive method, an arc-discharge method, and a CO2-laser technique. The characteristics of the stylus shaft in the process of detecting the displacement were then described. Finally, in the case wherein the stylus tip was fabricated using an adhesive, the deformation of the stylus tip caused by the contraction of an ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed using a finite-element method. Accordingly, a stylus shaft and tip with respective diameters of 0.4 µm or greater and 1 µm or greater were manufactured using the adhesive method. Moreover, the results helped confirm that stylus tips with diameters in the ranges of 20-196 and 1.2-300 µm were fabricated using the arc-discharge method and CO2-laser technique, respectively, with high yield. In addition, the results of the finite-element method revealed that the maximum elastic-deformation volume was approximately 0.8 nm and the effect of the contraction of the ultraviolet curing resin is minimal.

AB - This paper presents a system for measuring a 3D microstructure using an optical-fiber probe. A stylus shaft was fabricated using an acid-etch technique.We investigated the process of fabricating a stylus tip using an adhesive method, an arc-discharge method, and a CO2-laser technique. The characteristics of the stylus shaft in the process of detecting the displacement were then described. Finally, in the case wherein the stylus tip was fabricated using an adhesive, the deformation of the stylus tip caused by the contraction of an ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed using a finite-element method. Accordingly, a stylus shaft and tip with respective diameters of 0.4 µm or greater and 1 µm or greater were manufactured using the adhesive method. Moreover, the results helped confirm that stylus tips with diameters in the ranges of 20-196 and 1.2-300 µm were fabricated using the arc-discharge method and CO2-laser technique, respectively, with high yield. In addition, the results of the finite-element method revealed that the maximum elastic-deformation volume was approximately 0.8 nm and the effect of the contraction of the ultraviolet curing resin is minimal.

UR - http://www.scopus.com/inward/record.url?scp=85028560565&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85028560565&partnerID=8YFLogxK

U2 - 10.20965/ijat.2017.p0699

DO - 10.20965/ijat.2017.p0699

M3 - Article

AN - SCOPUS:85028560565

VL - 11

SP - 699

EP - 706

JO - International Journal of Automation Technology

JF - International Journal of Automation Technology

SN - 1881-7629

IS - 5

ER -