Field Assisted Reactive Gas Etching of Multiple Tips Observed using FIM

Rezwan Ahmed, Radovan Urban, Mark Salomons, Martin Cloutier, Seigi Mizuno, Robert Wolkow, Jason Pitters

研究成果: Contribution to journalArticle査読

抄録

A simple and cost effective method to fabricate multiple tungsten (W) single atom tips (SATs) from both poly and single crystalline wires is reported. Two or four tips attached to a holder are electrochemically etched together in NaOH solution followed by a controlled field assisted reactive gas etching in vacuum using nitrogen as an etching gas and helium as an imaging gas. A Common high voltage is applied simultaneously to all nanotips to shape the apexes towards single atoms. Single atom tips were achieved for both W(111) and W(110) while trimer tips were also achieved for W(111). This observation can lead to an important step towards realizing simplified etching processes of multiple tips which in turn can help to simultaneously fabricate numerous tips leading to mass fabrication and characterization.

本文言語英語
論文番号113216
ジャーナルUltramicroscopy
223
DOI
出版ステータス出版済み - 4 2021

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 器械工学

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