Field emission from ion-milled diamond films on Si

Tanemasa Asano, Yoshimichi Oobuchi

研究成果: Contribution to journalConference article査読

46 被引用数 (Scopus)

抄録

Diamond grains were grown on Si substrates by plasma-enhanced chemical vapor deposition. Ar ion milling was applied to the diamond/Si structures. It has been found that sharp diamond cones can be formed by ion milling if diamonds are in the form of isolated grains. It has also been found that the field emission current from diamond/Si samples is drastically increased by Ar ion milling and subsequent heat treatment in vacuum.

本文言語英語
ページ(範囲)431-434
ページ数4
ジャーナルJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
13
2
DOI
出版ステータス出版済み - 3 1995
外部発表はい
イベントProceedings of the 7th International Vacuum Microelectronics Conference - Grenoble, Fr
継続期間: 7 4 19947 7 1994

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 電子工学および電気工学

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