抄録
We propose a film composed of metal particles for use in field electron emitter material on a large substrate. Test films were prepared on a silicon substrate from a mixture of palladium fine particles and positive tone photoresist. It was found that the photoresist at the surface was acted as a barrier for electrons emission. It was also found that the emission current abruptly increases with time evolution applying a constant voltage. After this phenomenon, the threshold voltage for electron emission was drastically decreased and the emission current became stable.
本文言語 | 英語 |
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ページ | 235-236 |
ページ数 | 2 |
出版ステータス | 出版済み - 12月 1 2001 |
イベント | Proceedings of the 14th International Vacuum Microelectronics Conference - Davis, CA, 米国 継続期間: 8月 12 2001 → 8月 16 2001 |
その他
その他 | Proceedings of the 14th International Vacuum Microelectronics Conference |
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国/地域 | 米国 |
City | Davis, CA |
Period | 8/12/01 → 8/16/01 |
!!!All Science Journal Classification (ASJC) codes
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