Field emission from metal-particle bound with a photoresist

Akiyoshi Baba, Tanemasa Asano

研究成果: 会議への寄与タイプ学会誌査読

抄録

We propose a film composed of metal particles for use in field electron emitter material on a large substrate. Test films were prepared on a silicon substrate from a mixture of palladium fine particles and positive tone photoresist. It was found that the photoresist at the surface was acted as a barrier for electrons emission. It was also found that the emission current abruptly increases with time evolution applying a constant voltage. After this phenomenon, the threshold voltage for electron emission was drastically decreased and the emission current became stable.

本文言語英語
ページ235-236
ページ数2
出版ステータス出版済み - 12月 1 2001
イベントProceedings of the 14th International Vacuum Microelectronics Conference - Davis, CA, 米国
継続期間: 8月 12 20018月 16 2001

その他

その他Proceedings of the 14th International Vacuum Microelectronics Conference
国/地域米国
CityDavis, CA
Period8/12/018/16/01

!!!All Science Journal Classification (ASJC) codes

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