We propose a film composed of metal particles for use in field electron emitter material on a large substrate. Test films were prepared on a silicon substrate from a mixture of palladium fine particles and positive tone photoresist. It was found that the photoresist at the surface was acted as a barrier for electrons emission. It was also found that the emission current abruptly increases with time evolution applying a constant voltage. After this phenomenon, the threshold voltage for electron emission was drastically decreased and the emission current became stable.
|出版ステータス||出版済み - 12月 1 2001|
|イベント||Proceedings of the 14th International Vacuum Microelectronics Conference - Davis, CA, 米国|
継続期間: 8月 12 2001 → 8月 16 2001
|その他||Proceedings of the 14th International Vacuum Microelectronics Conference|
|Period||8/12/01 → 8/16/01|
!!!All Science Journal Classification (ASJC) codes