Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

Tsuyoshi Fujimura, Yukinori Kuroki, Tohru Hisakado, Akihiro Ikeda, Reiji Hattori, Yousuke Hakiai, Masanori Hidaka, Jae Young Choi, Suk Sang Chang

研究成果: ジャーナルへの寄稿記事

6 引用 (Scopus)

抄録

Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

元の言語英語
ページ(範囲)916-917
ページ数2
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
40
発行部数2 A
出版物ステータス出版済み - 2 1 2001

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Ablation
Synchrotron radiation
ablation
synchrotron radiation
Irradiation
molecular weight
irradiation
Molecular weight
radiation dosage
Film thickness
Refractive index
film thickness
refractivity

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation. / Fujimura, Tsuyoshi; Kuroki, Yukinori; Hisakado, Tohru; Ikeda, Akihiro; Hattori, Reiji; Hakiai, Yousuke; Hidaka, Masanori; Choi, Jae Young; Chang, Suk Sang.

:: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 40, 番号 2 A, 01.02.2001, p. 916-917.

研究成果: ジャーナルへの寄稿記事

Fujimura, Tsuyoshi ; Kuroki, Yukinori ; Hisakado, Tohru ; Ikeda, Akihiro ; Hattori, Reiji ; Hakiai, Yousuke ; Hidaka, Masanori ; Choi, Jae Young ; Chang, Suk Sang. / Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation. :: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2001 ; 巻 40, 番号 2 A. pp. 916-917.
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AU - Fujimura, Tsuyoshi

AU - Kuroki, Yukinori

AU - Hisakado, Tohru

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AU - Hattori, Reiji

AU - Hakiai, Yousuke

AU - Hidaka, Masanori

AU - Choi, Jae Young

AU - Chang, Suk Sang

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AB - Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

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