Fluctuation of position and energy of a fine particle in plasma nanofabrication

Masaharu Shiratani, Masahiro Soejima, Hyunwoong Seo, Naho Itagaki, Kazunori Koga

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

3 引用 (Scopus)

抜粋

We are developing plasma nanofabrication, namely, nano and micro scale guided assembly using plasmas. We manipulate nano and micro objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of a fine particle (= each object) in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. In the first experiment, we grabbed a fine particle in plasma using an optical tweezers. The fine particle moves in a potential well made by the optical tweezers. This is a kind of Brownian motion and the position fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one. In the second experiment, we deduced interaction potential between two fine particles during their Coulomb collision. We found that there exist repulsive and attractive forces between them. The repulsive force is a screened Coulomb one, whereas the attractive force is likely a force due to a shadow effect, a non-collective attractive force. Moreover, we noted that there is a fluctuation of the potential, probably due to fluctuation of electrostatic force. These position and potential energy fluctuations may limit the accuracy of guided assembly using plasmas.

元の言語英語
ホスト出版物のタイトルTHERMEC 2016
編集者Christof Sommitsch, Mihail Ionescu, Brajendra Mishra, Brajendra Mishra, Ernst Kozeschnik, T. Chandra
出版者Trans Tech Publications Ltd
ページ1772-1777
ページ数6
ISBN(印刷物)9783035711295
DOI
出版物ステータス出版済み - 1 1 2017
イベント9th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2016 - Graz, オーストリア
継続期間: 5 29 20166 3 2016

出版物シリーズ

名前Materials Science Forum
879
ISSN(印刷物)0255-5476
ISSN(電子版)1662-9752

その他

その他9th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2016
オーストリア
Graz
期間5/29/166/3/16

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • これを引用

    Shiratani, M., Soejima, M., Seo, H., Itagaki, N., & Koga, K. (2017). Fluctuation of position and energy of a fine particle in plasma nanofabrication. : C. Sommitsch, M. Ionescu, B. Mishra, B. Mishra, E. Kozeschnik, & T. Chandra (版), THERMEC 2016 (pp. 1772-1777). (Materials Science Forum; 巻数 879). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.879.1772