For making important contribution to progress and expansion on technology, academia, and industry

Hirokuni Hiyama, Seiichi Kondo, Syuhei Kurokawa

研究成果: ジャーナルへの寄稿評論記事

元の言語英語
ページ(範囲)833-835
ページ数3
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
78
発行部数10
DOI
出版物ステータス出版済み - 1 1 2012

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Bearing pads
Chemical mechanical polishing
Semiconductor materials
Industry

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

これを引用

For making important contribution to progress and expansion on technology, academia, and industry. / Hiyama, Hirokuni; Kondo, Seiichi; Kurokawa, Syuhei.

:: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 巻 78, 番号 10, 01.01.2012, p. 833-835.

研究成果: ジャーナルへの寄稿評論記事

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