Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

K. Koga, X. Dong, S. Iwashita, U. Czarnetzki, M. Shiratani

研究成果: Contribution to journalConference article

3 引用 (Scopus)

抜粋

We have studied formation of carbon nanoparticles using Ar+CH4 high pressure nanosecond discharge non-thermal plasmas. Transition pressure from uniform glow discharges to filamentary ones was clarified to obtain conditions under which uniform glow discharges are sustained. We have produced nanoparticles using the glow discharges, and then we have collected nanoparticles on the grounded electrode by the filtered vacuum collection method. Size distribution analysis reveals that the CH4 concentration is an important parameter in controlling nanoparticle growth. We have also studied film deposition on the powered electrode and the grounded electrode. The deposition rate on the powered electrode is 7 times higher than that on the grounded electrode. Optical emission observations suggest that radical generation rate near the powered electrode is twice higher than that near the grounded electrode, leading to high deposition rate on the powered electrode.

元の言語英語
記事番号012020
ジャーナルJournal of Physics: Conference Series
518
発行部数1
DOI
出版物ステータス出版済み - 1 1 2014
イベント26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本
継続期間: 9 23 20139 24 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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