Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting

Fujio Tsumori, Simon Hunt, Toshiko Osada, Hideshi Miura

研究成果: ジャーナルへの寄稿学術誌査読

13 被引用数 (Scopus)

抄録

Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (μTAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained.

本文言語英語
論文番号06FM03
ジャーナルJapanese journal of applied physics
54
6
DOI
出版ステータス出版済み - 6月 1 2015

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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